VPI SD-650MHT High-Vacuum Dual-Target Magnetron Sputtering System Successfully Deployed at the Materials Science Laboratory of Heilongjiang University of Science and Technology

VPI SD-650MHT High-Vacuum Dual-Target Magnetron Sputtering System Successfully Deployed at the Materials Science Laboratory of Heilongjiang University of Science and Technology

VPI’s vacuum coating systems focus on physical vapor deposition (PVD) technologies, particularly magnetron sputtering, and are known for their fast pump-down performance and stable deposition environments. The high-vacuum product series supports both DC and RF sputtering modes, enabling the deposition of a wide range of thin-film materials including metals, semiconductors, and ceramic insulators to meet diverse research requirements. In addition, VPI systems feature user-oriented designs with intuitive and user-friendly control interfaces, allowing new users to become proficient quickly. These technical and service advantages make VPI equipment an ideal choice for university laboratories seeking efficient and reliable thin-film preparation solutions.

The Materials Science Laboratory at Heilongjiang University of Science and Technology primarily supports teaching and research activities within the School of Materials Science, where thin-film deposition represents a key area of focus. By introducing VPI’s thin-film deposition system, faculty members and students are now able to independently prepare various functional thin films on campus, such as conductive coatings and optical layers. This not only strengthens practical teaching components but also provides reliable experimental support for research projects. With the new system in place, the laboratory can complete high-quality thin-film deposition internally, reducing dependence on external facilities and significantly accelerating research progress. Following careful evaluation and technical assessment, the materials research team selected VPI as its partner and introduced the SD-650MH high-vacuum dual-target magnetron sputtering system to further enhance laboratory capabilities.

Professional On-Site Deployment and Commissioning

For this project, VPI’s engineering team provided comprehensive on-site services, with careful planning and precise execution at every stage, from initial communication through final acceptance.

Requirement discussion and on-site preparation:VPI dispatched experienced engineers to the university laboratory to carry out on-site installation. The SD-650MH system arrived on campus as scheduled, where VPI engineers worked together with laboratory staff to complete unpacking and inspection. All components were carefully checked to ensure the system was undamaged during transportation and that all accessories were complete.

Installation and assembly:Based on the laboratory layout and the predefined installation plan, the engineers installed the vacuum chamber, frame, and all modular components step by step. The vacuum pumping system, sputtering cathodes, power supplies, cabling, and control units were connected with careful attention to mechanical stability and electrical safety. The entire assembly process was efficient, orderly, and compliant with laboratory safety standards.

System commissioning:After hardware installation, VPI engineers conducted comprehensive system commissioning. The vacuum system was first evacuated to its ultimate pressure to verify chamber sealing performance. Magnetron sputtering discharge tests were then performed at various power levels, with plasma conditions observed and process parameters optimized to ensure stable and controllable discharge behavior. Through repeated testing and parameter tuning, all key performance indicators met the design specifications.

Training and Acceptance

Once stable operation was confirmed, VPI engineers provided on-site operational training for laboratory faculty and students. The training covered system fundamentals, software interface functions, process parameter configuration, and essential safety guidelines. Users were guided step by step through practical operations including system startup, target replacement, vacuum pumping, and sputter deposition. During interactive Q&A sessions, all user questions were addressed in detail. After approximately half a day of hands-on training, laboratory staff and graduate students were able to independently conduct basic sputtering experiments.

Following successful training and trial deposition, VPI and the user jointly carried out final system acceptance. Vacuum level, deposition rate, and film thickness uniformity were verified against contractual specifications. Upon acceptance, the system was formally handed over for regular use. From initial coordination to full operation, the entire process was completed efficiently, providing the materials laboratory with a powerful and versatile thin-film deposition platform.

SD-650MH System Overview

The SD-650MH high-vacuum dual-target magnetron sputtering system delivered in this project is a flagship model developed by VPI for university research applications. Designed for multi-material thin-film preparation, the system combines a high-vacuum environment with versatile sputtering capabilities to support a broad range of materials science research activities. It consists of a vacuum chamber, dual magnetron sputtering cathodes, a rotating sample stage, a vacuum pumping system, vacuum gauges, sputtering power supplies, and an intelligent control system. The modular integrated design ensures both operational stability and ease of maintenance.

Key Features

• High vacuum performance:

  Equipped with a mechanical pump and turbomolecular pump, the system achieves vacuum levels on the order of 10⁻⁵ Pa, providing a clean and stable deposition environment that significantly enhances thin-film quality.

• Dual-target sputtering:

  Two 50 mm diameter magnetron sputtering cathodes can be mounted simultaneously, allowing deposition of different materials without breaking vacuum and enabling efficient multilayer film fabrication.

• DC and RF compatibility:

  Independently controlled DC and RF power supplies are provided, with DC sputtering power up to 1000 W and RF power up to 300 W. This configuration supports conductive metals, semiconductors, and insulating ceramic targets, fully meeting diverse deposition requirements.

• Uniform film deposition:

  The built-in rotating sample stage supports substrate rotation and heating, improving film thickness uniformity and promoting uniform target erosion. Excellent thickness consistency can be achieved even for large-area substrates and demanding optical or functional coatings.

• Precise process control:

  Stable plasma discharge and accurately adjustable deposition rates enable precise control of film thickness through software-defined sputtering time and power, ensuring high reproducibility of experimental results.

  
  

• User-friendly operation:

  An intelligent touchscreen interface and automated control programs provide clear parameter display and simple operation. Multiple safety interlocks and status indicators allow even first-time users to operate the system efficiently while maintaining a high level of operational safety.

User Feedback and Ongoing Support

Laboratory staff reported that the training provided by VPI engineers was efficient and thorough, enabling the team to quickly build confidence in operating the new system. The SD-650MH has since been used independently for routine teaching experiments and fundamental research work. Users expressed high satisfaction with the system’s performance, stability, and ease of use, and strongly recognized the professionalism of VPI’s engineering team.

After system delivery and commissioning, VPI continues to provide long-term support. The company offers comprehensive after-sales services including remote technical assistance, routine system inspection and maintenance, as well as software upgrades and functional expansions based on user needs. Should any technical issues arise, laboratory staff can promptly contact VPI engineers via online or telephone support to receive professional solutions. Periodic follow-up visits further ensure that the system remains in optimal operating condition over the long term.